TECHICAL Series MATHEMATICS • INFORMATICS • PHYSICS Series PHILOLOGY Series ECONOMIC SCIENCES Sereies EDUCATIONAL SCIENCES Series LAW AND SOCIAL SCIENCES Series
Obtaining Ultra-Thin Layers CdS with Magnetron Sputtering Method
(Obţinerea de straturi de CdS prin metoda magnetron sputtering)
Vol LXIII • No. 2/2011
Ioniţă Gheorghe*, Chiţanu Elena**, Stoian Elena Valentina*, Rizescu Cristiana Zizi*
* "VALAHIA" University Târgovişte, Department of Materials, Equipments, Installations and Robots
e-mail: valicirstea@yahoo.com
** National Institute for R&D in Electrical Engineering, ICPE-CA, Bucharest

 Keywords   magnetron sputtering, CdS, thin films.

 Abstract
This paper presents research results on obtaining CdS thin layers using a method of physical vapour deposition, namely magnetron sputtering. We used a target of CdS obtained by pressing with a diameter of 40mm. Deposit layers was done by magnetron sputtering in argon atmosphere. Thicknesses obtained were determined by an interferometer and method using X-diffraction analysis of CdS layers getting confirmed.

 Rezumat
Lucrarea prezintă rezultatele cercetării cu privire la obţinerea straturilor subţiri de CdS utilizând o metodă fizică de depuenere din vapori, şi anume magnetron sputtering. S-a utilizat o ţintă de CdS obţinută prin presare, având diametrul de 40mm. Depunerea straturilor s-a realizat prin metoda magnetron sputering, în atmosferă de argon. Grosimea straturilor obţinute au fost determinate printr-o metodă interferometrică, iar cu ajutorul analizei de difracţie de raze X s-a confirmat obţinerea straturilor de CdS.



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